Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727056 | Method and structure for cutting dense line patterns using self-aligned double patterning | Lu Fan, Zi Qun Hua, Qingchen Cao, Yaobin Feng, Zhiliang Xia +1 more | 2020-07-28 |