Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593584 | Electrostatic chuck for clamping in high temperature semiconductor processing and method of making same | Brent Donald Alfred Elliot, Frank Balma, Jason Stephens, Guleid Hussen | 2020-03-17 |