Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10646941 | Method for manufacture of a multi-layer plate device | Alfred Grant Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser | 2020-05-12 |
| 10593584 | Electrostatic chuck for clamping in high temperature semiconductor processing and method of making same | Frank Balma, Michael Parker, Jason Stephens, Guleid Hussen | 2020-03-17 |