Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10822458 | Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films | Manchao Xiao, Matthew R. MacDonald, Meiliang Wang | 2020-11-03 |
| 10763103 | Boron-containing compounds, compositions, and methods for the deposition of a boron containing films | Moo-Sung Kim | 2020-09-01 |
| 10745808 | Methods for depositing Group 13 metal or metalloid nitride films | Moo-Sung Kim, Sergei Vladimirovich Ivanov | 2020-08-18 |
| 10703915 | Compositions and methods for the deposition of silicon oxide films | Meiliang Wang, Matthew R. MacDonald, Richard Ho, Manchao Xiao, Suresh K. Rajaraman | 2020-07-07 |