Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10745808 | Methods for depositing Group 13 metal or metalloid nitride films | Xinjian Lei, Moo-Sung Kim | 2020-08-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10745808 | Methods for depositing Group 13 metal or metalloid nitride films | Xinjian Lei, Moo-Sung Kim | 2020-08-18 |