Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665421 | In-situ beam profile metrology | Tsung-Liang Chen, Kevin Anglin | 2020-05-26 |
| 10546730 | Filling a cavity in a substrate using sputtering and deposition | John Hautala | 2020-01-28 |