MD

Michael S. DeLucia

VA Varian Semiconductor Equipment Associates: 1 patents #41 of 114Top 40%
🗺 Massachusetts: #5,137 of 14,474 inventorsTop 40%
Overall (2020): #348,345 of 565,922Top 65%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10741361 Dual cathode ion source Bon-Woong Koo, Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro +2 more 2020-08-11