Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825645 | System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing station | Eric D. Wilson, Michael W. Osborne, Julian G. Blake | 2020-11-03 |
| 10658207 | Platen for reducing particle contamination on a substrate and a method thereof | Dale K. Stone, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh | 2020-05-19 |