Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658207 | Platen for reducing particle contamination on a substrate and a method thereof | David E. Suuronen, Shigeo Oshiro, Arthur P. Riaf, Edward D. MacIntosh | 2020-05-19 |
| 10541137 | Method and apparatus for non line-of-sight doping | Christopher R. Hatem, Piero Sferlazzo, Roger B. Fish | 2020-01-21 |