Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768025 | Encoder, position measurement system and lithographic apparatus involving an enclosing device | Wouter Onno Pril, Allard Eelco Kooiker, Suzanne Johanna Antonetta Geertruda Cosijns, Bryan Tong-Minh | 2020-09-08 |