Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866531 | Athermalization of an alignment system | Maarten Van Der Heijden, Frederikus Johannes Maria De Vreede, David Taub, Eric D. Emery, Joseph Franklin | 2020-12-15 |
| 10768025 | Encoder, position measurement system and lithographic apparatus involving an enclosing device | Wouter Onno Pril, Jan P. Baartman, Allard Eelco Kooiker, Bryan Tong-Minh | 2020-09-08 |