Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818538 | Wafer holding mechanism for rotary table and method and wafer rotating and holding device | Ikuo Mashimo, Masaki Tamura | 2020-10-27 |
| 10808865 | Controlling method of driving a vacuum valve | Tomohiro Sawahata | 2020-10-20 |
| 10746307 | Method of controlling a gate valve | Tomohiro Sawahata, Katsuyuki Saitoh, Shuichi Araki, Yoshinori Tobita, Mitsuhiro Ikeda | 2020-08-18 |
| 10558190 | Multi-mode-control apparatus for inner pressure of vacuum chamber and multi-mode-control method for inner pressure of vacuum chamber | Takayuki Tadokoro, Akira Iwamoto | 2020-02-11 |