Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818538 | Wafer holding mechanism for rotary table and method and wafer rotating and holding device | Masaki Tamura, Hideaki Nagai | 2020-10-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818538 | Wafer holding mechanism for rotary table and method and wafer rotating and holding device | Masaki Tamura, Hideaki Nagai | 2020-10-27 |