Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10767987 | Sensor head for crystal oscillator type of film thickness monitor | Yousuke Oguma, Akihiro Maeda, Yuki Kaida, Kou Okamura | 2020-09-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10767987 | Sensor head for crystal oscillator type of film thickness monitor | Yousuke Oguma, Akihiro Maeda, Yuki Kaida, Kou Okamura | 2020-09-08 |