Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10767987 | Sensor head for crystal oscillator type of film thickness monitor | Yousuke Oguma, Akihiro Maeda, Manabu Kotaka, Kou Okamura | 2020-09-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10767987 | Sensor head for crystal oscillator type of film thickness monitor | Yousuke Oguma, Akihiro Maeda, Manabu Kotaka, Kou Okamura | 2020-09-08 |