Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10570512 | Substrate processing apparatus | Toshihiko Iwao, Kiyotaka Ishibashi, Satoru Kawakami | 2020-02-25 |
| 10546725 | Plasma processing apparatus | Toshihiko Iwao | 2020-01-28 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10570512 | Substrate processing apparatus | Toshihiko Iwao, Kiyotaka Ishibashi, Satoru Kawakami | 2020-02-25 |
| 10546725 | Plasma processing apparatus | Toshihiko Iwao | 2020-01-28 |