Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804077 | Microwave plasma source, microwave plasma processing apparatus and plasma processing method | — | 2020-10-13 |
| 10570512 | Substrate processing apparatus | Takahiro HIRANO, Kiyotaka Ishibashi, Satoru Kawakami | 2020-02-25 |
| 10546725 | Plasma processing apparatus | Takahiro HIRANO | 2020-01-28 |