Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665465 | Surface treatment method for SiC substrate | Tadaaki Kaneko, Koji Ashida, Yasunori Kutsuma, Satoshi Torimi, Youji Teramoto +2 more | 2020-05-26 |
| 10665485 | Heat treatment vessel for single-crystal silicon carbide substrate and etching method | Satoshi Torimi, Norihito Yabuki, Satoru Nogami | 2020-05-26 |