Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847342 | Reference sample with inclined support base, method for evaluating scanning electron microscope, and method for evaluating SiC substrate | Koji Ashida | 2020-11-24 |
| 10699873 | Reference sample with inclined support base, method for evaluating scanning electron microscope, and method for evaluating SiC substrate | Koji Ashida | 2020-06-30 |
| 10665465 | Surface treatment method for SiC substrate | Koji Ashida, Yasunori Kutsuma, Satoshi Torimi, Masato Shinohara, Youji Teramoto +2 more | 2020-05-26 |