Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10864548 | Film forming method and film forming apparatus | Hiroaki Ashizawa, Yasushi Fujii, Tsuyoshi Takahashi, Seokhyoung HONG, Kazuyoshi Yamazaki +2 more | 2020-12-15 |
| 10767262 | Gas supply apparatus and gas supply method | Shigeyuki Okura | 2020-09-08 |