Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870920 | Gas supply device and valve device | — | 2020-12-22 |
| 10767262 | Gas supply apparatus and gas supply method | Yu Nunoshige | 2020-09-08 |
| 10584414 | Substrate processing method that includes step of introducing ballast gas to exhaust line while supplying processing gas | Yuki KEIMOTO | 2020-03-10 |