Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784110 | Tungsten film forming method, film forming system and film forming apparatus | Koji Maekawa, Katsumasa Yamaguchi | 2020-09-22 |
| 10612139 | Method of forming a tungsten film having a low resistance | Koji Maekawa, Shintaro Aoyama, Mikio Suzuki, Susumu Arima, Atsushi Matsumoto +1 more | 2020-04-07 |