SA

Susumu Arima

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #261,113 of 565,922Top 50%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10612139 Method of forming a tungsten film having a low resistance Koji Maekawa, Takashi Sameshima, Shintaro Aoyama, Mikio Suzuki, Atsushi Matsumoto +1 more 2020-04-07