Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10676823 | Processing method and processing apparatus | Ryota Sakane, Hiroshi Nagahata, Hideyuki Kobayashi, Koji Yamagishi | 2020-06-09 |
| 10553408 | Supporting member and substrate processing apparatus | Akihiro Yoshimura, Yasushi Masuda | 2020-02-04 |