Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832891 | Plasma processing apparatus and plasma processing method | Hideyuki Kobayashi, Hiroshi Nagahata, Jungwoo Na | 2020-11-10 |
| 10676823 | Processing method and processing apparatus | Takashi Kitazawa, Hiroshi Nagahata, Hideyuki Kobayashi, Koji Yamagishi | 2020-06-09 |