Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10699883 | Plasma processing apparatus, method of operating plasma processing apparatus, and power supply device | — | 2020-06-30 |
| 10679869 | Placing table and plasma treatment apparatus | Dai KITAGAWA, Katsuyuki Koizumi, Tsutomu Nagai, Daisuke Hayashi | 2020-06-09 |