Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679869 | Placing table and plasma treatment apparatus | Dai KITAGAWA, Tsutomu Nagai, Daisuke Hayashi, Satoru TERUUCHI | 2020-06-09 |
| 10593522 | Electrostatic chuck, placing table and plasma processing apparatus | Dai KITAGAWA, Tomoyuki Takahashi | 2020-03-17 |