Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867820 | Substrate transfer device and substrate transfer method | Tsutomu Sakurabayashi | 2020-12-15 |
| 10811289 | Substrate transfer apparatus and substrate processing system comprising plural connection units arranged side by side in a vertical and lateral directions along one side surface of a transfer chamber | — | 2020-10-20 |