TS

Tsutomu Sakurabayashi

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #237,457 of 565,922Top 45%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10867820 Substrate transfer device and substrate transfer method Norihiko Tsuji 2020-12-15