Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622196 | Plasma processing apparatus | Nobuyuki Nagayama | 2020-04-14 |
| 10566175 | Focus ring and plasma processing apparatus | Nobuyuki Nagayama, Masahiko Oka, Yasuyuki Matsuoka | 2020-02-18 |