Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10566175 | Focus ring and plasma processing apparatus | Nobuyuki Nagayama, Naoyuki Satoh, Yasuyuki Matsuoka | 2020-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10566175 | Focus ring and plasma processing apparatus | Nobuyuki Nagayama, Naoyuki Satoh, Yasuyuki Matsuoka | 2020-02-18 |