Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10833045 | Substrate processing apparatus and manufacturing method of substrate holding unit | Yoshitaka Otsuka, Takashi Terada | 2020-11-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10833045 | Substrate processing apparatus and manufacturing method of substrate holding unit | Yoshitaka Otsuka, Takashi Terada | 2020-11-10 |