Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10781515 | Film-forming method and film-forming apparatus | Hiromi Shima, Eiji Kikama, Keisuke Suzuki | 2020-09-22 |
| 10636649 | Method and apparatus for forming silicon oxide film on tungsten film | Koji Sasaki, Toshiyuki Ikeuchi | 2020-04-28 |
| 10553686 | Method and apparatus for forming silicon oxide film, and storage medium | Hiromi Shima, Eiji Kikama, Shingo Hishiya | 2020-02-04 |