Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10781515 | Film-forming method and film-forming apparatus | Kyungseok Ko, Hiromi Shima, Keisuke Suzuki | 2020-09-22 |
| 10553686 | Method and apparatus for forming silicon oxide film, and storage medium | Kyungseok Ko, Hiromi Shima, Shingo Hishiya | 2020-02-04 |