Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870916 | Gas supply member and gas processing apparatus | — | 2020-12-22 |
| 10786837 | Method for cleaning chamber of substrate processing apparatus | Yukimasa Saito, Toshiki HINATA, Kazuya Dobashi, Shuji Moriya | 2020-09-29 |