Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10786837 | Method for cleaning chamber of substrate processing apparatus | Yukimasa Saito, Toshiki HINATA, Kyoko Ikeda, Shuji Moriya | 2020-09-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10786837 | Method for cleaning chamber of substrate processing apparatus | Yukimasa Saito, Toshiki HINATA, Kyoko Ikeda, Shuji Moriya | 2020-09-29 |