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Junpei SASAKI

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #400,971 of 565,922Top 75%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10872797 Substrate processing apparatus and method of operating substrate processing apparatus Hiromitsu Sakaue 2020-12-22