Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872797 | Substrate processing apparatus and method of operating substrate processing apparatus | Junpei SASAKI | 2020-12-22 |
| 10607878 | Transfer device and correction method | Seiji ISHIBASHI | 2020-03-31 |