Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714332 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama +3 more | 2020-07-14 |
| 10550470 | Film forming apparatus and operation method of film forming apparatus | Kentaro Oshimo, Shimon Otsuki, Takeshi Oyama, Hiroaki Ikegawa, Jun Ogawa | 2020-02-04 |