Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553463 | Temperature control system, semiconductor manufacturing device, and temperature control method | Atsushi Kobayashi, Atsuhiko Tabuchi, Kazutoshi Itoh, Yasuhisa Hirose, Keiichi Nishikawa +1 more | 2020-02-04 |