Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553463 | Temperature control system, semiconductor manufacturing device, and temperature control method | Atsushi Kobayashi, Atsuhiko Tabuchi, Hideki Wakai, Yasuhisa Hirose, Keiichi Nishikawa +1 more | 2020-02-04 |