Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734192 | Precision substrate material multi-processing using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Theodore A. Prescop | 2020-08-04 |
| 10734383 | Methods, structures, and designs for self-aligning local interconnects used in integrated circuits | Scott T. Becker | 2020-08-04 |
| 10658153 | Precision substrate material multi-processing using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Theodore A. Prescop | 2020-05-19 |
| 10659229 | Secure permanent integrated circuit personalization | David K. Lam, Theodore A. Prescop, Kevin M. Monahan | 2020-05-19 |
| 10607845 | Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays | Kevin M. Monahan, Theodore A. Prescop, David K. Lam | 2020-03-31 |