Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734192 | Precision substrate material multi-processing using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2020-08-04 |
| 10658153 | Precision substrate material multi-processing using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2020-05-19 |
| 10659229 | Secure permanent integrated circuit personalization | Michael C. Smayling, David K. Lam, Kevin M. Monahan | 2020-05-19 |
| 10607845 | Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2020-03-31 |