Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10655638 | Turbomolecular pump deposition control and particle management | Peter Reimer | 2020-05-19 |
| 10625915 | Ultrasecure card package | — | 2020-04-21 |
| 10591934 | Mass flow controller for substrate processing | Sudhakar Gopalakrishnan, Peter Reimer, John Haruff | 2020-03-17 |