Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10655638 | Turbomolecular pump deposition control and particle management | Dennis R. Smith | 2020-05-19 |
| 10591934 | Mass flow controller for substrate processing | Sudhakar Gopalakrishnan, John Haruff, Dennis R. Smith | 2020-03-17 |