Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770327 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Chi-Hung Liao, Yueh-Lin Yang | 2020-09-08 |
| 10651066 | Metrology method in wafer transportation | Powen Huang, Yao-Yuan SHANG, Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin | 2020-05-12 |