Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787742 | Control system for plasma chamber having controllable valve and method of using the same | Ying Xiao, Chin-Hsiang Lin | 2020-09-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787742 | Control system for plasma chamber having controllable valve and method of using the same | Ying Xiao, Chin-Hsiang Lin | 2020-09-29 |