Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861698 | Pattern fidelity enhancement | Yu-Tien Shen, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen, Wei-Hao Wu +3 more | 2020-12-08 |
| 10707081 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Yu-Tien Shen, Po-Chin Chang, Chien-Wen Lai +7 more | 2020-07-07 |