Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727097 | Mechanisms for cleaning substrate surface for hybrid bonding | Sheng-Chau Chen, Chih-Hui Huang, Yeur-Luen Tu, Cheng-Ta Wu, Chia-Shiung Tsai | 2020-07-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727097 | Mechanisms for cleaning substrate surface for hybrid bonding | Sheng-Chau Chen, Chih-Hui Huang, Yeur-Luen Tu, Cheng-Ta Wu, Chia-Shiung Tsai | 2020-07-28 |