Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840102 | Integrated system, integrated system operation method and film treatment method | Weibo Yu, Kuo-Sheng Chuang, Chin-Hsiang Lin | 2020-11-17 |
| 10734231 | Systems and methods for a tunable electromagnetic field apparatus to improve doping uniformity | Chien-An Lai, Joseph Wu | 2020-08-04 |
| 10714348 | Semiconductor device having hydrogen in a dielectric layer | Hongfa Luan, Yi-Fan Chen, Chun-Yen Peng, Cheng-Po Chau, Huicheng Chang | 2020-07-14 |